MET ONE 3411

MET ONE 3411 portable air particle counters are designed specifically for semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.  With industry leading ISO 21501 accuracy and reproducibility, the MET ONE 3411 is the cleanest 0.1um portable air particle counter in the market.

Portable Air Particle Counter | Benefits of selecting the MET ONE 3411

Keeps your cleanroom clean

The only 0.1um particle counter without a dirty exhaust fan

Hot-swappable batteries –100% instrument availability

Hot-swappable batteries eliminate the need to stop measuring while your instrument charges or for powering down, zero counting and powering back up

Test Wizard for easier compliance - organize your cleanroom

Save time and eliminate errors when monitoring your semiconductor production environments.

Sequential sampling - manifold system

Low cost site monitoring solutions can be deployed with the MET ONE Model 3432 manifold.  Sample sequentially from up to 32 locations with a single MET ONE Model 3411 series particle counter.

Flexible Communications – easy setup and data transfer

Reduce your paperwork with wireless, Ethernet and serial communication options to MET ONE Data Management or your own software solutions

Intuitive user interface

Easily set up sampling plans by area, location and operating parameter, saving operator time.  Eliminate setup errors and save time by exporting setup configuration to USB memory stick and deploy your sampling plan across your entire particle counting fleet!

ISO 21501-4 reliability and accuracy

Designed for exceptional particle counting performance providing ISO 21501-4 compliant unit-to-unit accuracy and reproducibility

Number of Size Channels 6
Particle Sizes 0.1, 0.2, 0.3, 0.5, 1.0, 5.0µ
Light Source Helium Neon Laser
Weight Without battery: 15.9 kg (35 lbs), Battery: 0.66 kg (1.45 lbs)
Dimensions 33 W x 55.9 D x 22.9 H cm (13 x 22 x 9 inches)
Enclosure Easy to clean Stainless Steel
Flow Rate 1.0 CFM (28.3 LPM)
Zero Count ISO 21501-4 and JIS B 9921: 1 count or less in 5 minutes, 95% UCL
Coincidence Loss 5% at 50,000 /ft3 per ISO 21501-4 method
Pump Patented multi-lobe closed loop controlled rated for continuous use
Counting Efficiency 50% at 0.1 μm; 100% for particles > 0.15 μm per ISO 21501-4 and JIS B 9921
Operating Temperature 10° to 40°C (50° to 104°F); 10 to 90% relative humidity, non-condensing
Display ¼ VGA Color TFT touch screen
Printer High speed thermal
Language English, French, German, Italian, Spanish, Korean*, Japanese*, Chinese
Maximum Count Displayed 9,999,999 displayed
Delay Time 15 seconds to 23 hours 59 minutes 59 seconds
Sample/Hold Times 1 second to 23 hours 59 minutes 59 seconds
Count Alarms 1 to 9,999,999 counts
Locations ID: 0 to 999; NAME: Alphanumeric, appears on printout
Data Storage 5,000 samples, scrollable on Historical Data review screen (FIFO or Overflow)
Outputs USB Client (Version 1.1) USB Host (Version 1.1) RS-485 Ethernet with TCP/IP protocol Wireless with 802.11g protocol (optional) Met One 3432 manifold Auxiliary (alarm and scan probe)
Communication Protocol Modbus TCP , Modbus RTU , Serial FX
Inputs Air Velocity Probe, RH/Temperature Probe
Auto CDA Purge Purge solenoid activated by connection to Clean Dry Air source
Power 24 VDC with 100-240 VAC, 50/60 Hz adapter
Battery Type Lithium ion smart battery; rechargeable, ejectable, and hot-swappable
Battery Operating Time  3 hours minimum
Battery Recharge Time 6.75 hours minimum, 10 hours maximum
Battery Quantity Included 2 each

Accessories included with the MET ONE 3411 Portable Air Particle Counter

Part Number Description
2087966-01 Isokinetic probe 1.00 CFM nickel plated aluminum 3/8” barbed fitting
960380 Tubing, sample, 3/8” ID, 10 ft
2088035-01 IsokineticProbe adapter, aluminum
970650 Tripod for Isokinetic-Probe
230-300-7052 Power Supply 24VDC output
VP623500 AC Power Cord, 72", 230V, BLACK
VP623501 Power Cord: 115VAC, 6' L
2087939-01 Zero count filter 1CFM
2087090 PortAll software, CD
460519 Printer paper, 2 rolls
280-120-2024 2 x Battery pack, Lithium Ion
210-400-5171 Touch screen stylus
2088010-01 USB memory drive 128M
410-150-0011 3 pin mini terminal block
410-420-0020 Back shell for 410-150-0011
490-200-0001 Wireless Antenna Included with wireless version P/N 2088800-02

Optional Accessories for the MET ONE 3411 Portable Air Particle Counter

Part Number Description
CAL_GAS_3411 GAS CALIBRATION, He, Ar, CO2, & N2 for model 3411
701241-01  IQ/OQ 3400 series Validation Documents (CD)
2087966-02 Isokinetic Probe, 1.0 CFM Stainless Steel, 3/8” barbed fitting
2089406-01 Isokinetic-Probe Stand
460519 Printer Paper (per roll)
280-300-5000 Smart Battery Charger
280-120-2024 Battery, Smart Lithium Ion
2088928 Temperature & Relative Humidity Probe Vaisala HMP50
2087939-01 Zero count filter 1.0 CFM
460-400-4798 Cable, USB 2.0, Hi Speed, 1 meter
2084045-02 Particle Vision PortAll, version 2.0, Kit, download utility software, adapter and manual (serial cable must be purchased separately)
700011-21 PortAll License Standard Edition
2088000-01 Filter scanning probe (with electronics) 1 CFM
2088000-02 Filter scanning probe (without electronics) 1 CFM
2088012-02 Adapter, USB to RS-232, USB cable, DB-9 null modem and Modbus register map
2088012-01 Adapter, USB to RS-485, USB cable and Modbus register map
2080732-8 High Pressure Diffuser for use with 1.0 CFM units

Airborne particle counting for semiconductor applications:

Cleanroom verification monitoring

Cleanroom classification

ISO 14644 cleanroom verification

Cleanroom particulate monitoring

Sequential monitoring of manufacturing processes

Process troubleshooting particle contamination sources

HEPA filter leak detection across 0.1, 0.15, 0.2, 0.3, 0.5 and 1um sizes

Filter scanning

High pressure gas monitoring with simple gas selection menu and automatic sample flow adjustment

Airborne particle counter semiconductor standards and committees:

International Organization for Standards (ISO)

ISO 14644 Cleanrooms and associated controlled environments

ISO 21501 Determination of particle size distribution - Light scattering airborne particle counters for clean spaces

The Institute of Environmental Sciences and Technology (IEST)

Q. What are the benefits of embracing the ISO 21501-4 particle counter calibration standard?
A. The particle counting instrument’s repeatability and reproducibility is ensured regardless of model type.
Q. What is the difference between the ISO 21501-4 and traditional particle counter calibrations?
A. ISO 21501-4 uses NIST traceable standard particles to perform the size calibration.  Moreover, in addition to size calibration, extensive post-calibration performance tests are conducted to ensure actual particle count accuracy.
Q. Will ISO 21501-4 performance be maintained over the life of the instrument?
A. Yes, the ISO 21501-4 calibration is designed to be performed during the normal particle counter calibration intervals.
Q. Are MET ONE 3411 portable air particle counters required to be sent to the factory for the ISO 21501-4 calibration?
A. No, with the industry's largest global network of local service offices, we are the only company that can deliver fully compliant on-site service for your instruments, including full ISO 21501-4 calibrations. Each of our automated particle counting monitoring solutions report the calibration status of each instrument and proactively notify you of upcoming calibrations to ensure full service compliance of all batch production and environmental monitoring measurements.
Q. Why does the MET ONE 3411 portable air particle counter use a HeNe laser?
A. Helium Neon (HeNe) lasers have long been an attractive choice for airborne particle counter (APC) design.  The HeNe’s output of collimated, monochromatic light, which is emitted with high optical power and uniformity, can be exploited to produce particle counters with excellent particle sensitivity and sizing resolution.  Additionally, HeNe based air particle sensors require fewer optical parts resulting in reduced cost and increased reliability.
Q. Is the firmware on the 3411 series upgradable?
A. The MET ONE 3411’s firmware is normally updated annually to keep up with regulatory changes and to provide users with access to the latest functional enhancements.
Q. Do I have to send my MET ONE 3411 portable air particle counter back to the factory for upgrades?
A. No - Upgrades can easily be performed on-site by a Hach MET ONE Field Service Engineer via USB memory stick.  Normally, particle size recalibration is not required.
Q. Does the MET ONE 3411 portable air particle counter support sequential sampling with a manifold?

Yes, the MET ONE 3432 Manifold with 32 ports is compatible with the MET ONE 3411 portable air particle counter.