FMS

Facility Monitoring System

MET ONE facility monitoring systems are scalable on-line particle monitoring solutions based on open architecture communications that integrate easily with your preferred systems. Our full suite of remote and portable air particle counters feature full ISO 21501 compliance and 21 CFR Part 11 compliant data management software.

MET ONE will manage the design and install of your particle counting facility monitoring system

MET ONE offers project management, system definition and design, software customization, validation, and installation services

MET ONE facility monitoring systems will integrate into your existing legacy systems

Integrate our instruments with your existing Enterprise Information Systems, LIMS, or Building Management System

MET ONE gives you on-site service

Largest industry global network of local service offices with fully compliant on-site service for your instruments, including full ISO 21501-4 calibrations. Our service agreement programs provide proactive pre-scheduled on-site calibration and maintenance services, including discounts for any repairs.

MET ONE facility monitoring solutions eliminate data silos within multiple systems

Eliminate validation, maintenance, and upgrades for multiple monitoring systems Eliminate multiple reports by including non-viable particle data with all other production data

MET ONE compliance services

SOP development assistance for manual monitoring Full validation documentation packages for automated systems URS planning Validation documentation packages (Installation Qualification/Operation Qualification) Validation testing process and final sign-off assistance

MET ONE offers a full suite of environmental sensors and system accessories

Relative humidity and temperature sensors Air velocity sensors Differential pressure sensors IO modules connect to existing sensors, door switches, tool interrupts, etc. Ethernet switches, touch-screen NEMA computers etc. Distributed vacuum systems Distributed DC power systems Multi-function alarm modules

MET ONE 3400 Portable Air Particle Counters

Sequential sampling - manifold system

Low cost site monitoring solutions can be deployed with the MET ONE Model 3432 manifold.  Sample sequentially from up to 32 locations with a single MET ONE Model 3400 series particle counter.

Hot-swappable batteries –100% instrument availability

Hot-swappable batteries eliminate the need stop measuring while your instrument charges or for powering down, zero counting and powering back up

Test Wizard for easier compliance - organize your cleanroom

Save time and eliminate errors when monitoring your cleanroom environments.

Flexible communications – easy setup and data transfer

Reduce your paperwork with wireless, Ethernet and serial communication options to MET ONE Data Management or your own software solutions

Intuitive user interface

Easily set up sampling plans by area, location and operating parameter, saving operator time.  Eliminate setup errors and save time by exporting setup configuration to USB memory stick and deploy your sampling plan across your entire particle counting fleet!

Multiple user login assures compliance

Password protected multi-level user access to instrument provides data security for 21 CFR Part 11 compliance

ISO 21501-4 reliability and accuracy

Designed for exceptional particle counting performance providing ISO 21501-4 compliant unit-to-unit accuracy and reproducibility

MET ONE 6000 remote air particle counters

Industry leading particle counting on-line reliability

ISO 21501 compliant with built-in flow sensor for CFR21 data accuracy and reliability

Flexible for all your remote air particle counter applications

Flexible particle count size in 0.3um or 0.5um sensitivity at 0.1cfm or 1.0cfm flow rates

Industry leading quality and reliability

Long life laser diode for guaranteed continuous monitoring

Easy to integrate with any facility monitoring system

Open architecture design to communicate seamlessly with your system

Multiple communication options: Pulse, Serial Modbus, Ethernet, Wireless and Analog

Faster trouble shooting and reduced downtime

MET ONE 6000 remote air particle counters can be diagnosed for flow, sensor, or communication failures to provide advanced notification of hardware problems

Count alarm and alerts enable visual notification via built-in status lights

Easy installation options – reducing cost

Reduce initial installation cost with MET ONE 6000 remote air particle counter’s integrated multi-parameter measurements. Optional relative humidity and temperature probe integrates RH/T data with particle count data in same data stream

MET ONE 6000P pumped remote air particle counters

Easy installation and reduced cost

Built-in pump allows installation anywhere without high cost vacuum pump requirements

Industry leading particle counting on-line reliability

ISO 21501 compliant with built-in flow sensor for CFR21 data accuracy and reliability

Flexible for all your remote air particle counter applications

Flexible particle count size in 0.3um or 0.5um sensitivity at 0.1cfm or 1.0cfm flow rates

Industry leading quality and reliability

Long life laser diode for guaranteed continuous monitoring

Easy to integrate with any facility monitoring system

Open architecture design to communicate seamlessly with your system.

Multiple communication options: Pulse, Serial Modbus, Ethernet, Wireless and Analog

MET ONE 7000 remote air particle counters

Rugged design for cleanroom use

Stainless VHP,  wash-down and chemically tolerant NEMA 4X enclosures

Industry leading particle counting on-line reliability

ISO 21501 compliant with  built-in flow sensor for CFR21 data accuracy and reliability

Flexible for all your remote air particle counter applications

Flexible particle count size in 0.5um and 5um sensitivity at 0.1cfm or 1.0cfm flow rates

Industry leading quality and reliability

Long life laser diode for guaranteed continuous monitoring

Easy to integrate with any facility monitoring system

Open architecture design to communicate seamlessly with your system

Multiple communication options: Pulse, Serial Modbus, Ethernet, Wireless and Analog


ISO 14644 Compliance

ISO21501 compliance ensures you are proactively compliant to the next revision of ISO14644.

A-septic Clean Room Manufacturing

The MET ONE 6000 remote air particle counter is specifically designed to manage all A-septic fill clean room fixed location applications.

Semiconductor Clean Room Environments

Industry’s most accurate particle counting fully complies to ISO21501 calibration standards, the MET ONE 6000 remote air particle counter assures increase yield.

Flat Panel Clean Room Environments

Increase yield and eliminate contamination concerns in your flat panel production area with the MET ONE 6000 remote air particle counter.

Hard Disk Drive Clean Room Environments

The MET ONE 6000 remote air particle counter provides low cost of ownership price-per-point particle counting with industry leading high quality.

Airborne Particle Counter Life Sciences Standards and Committee's:

International Organization for Standards (ISO)

ISO14644 clean room and controlled environments standard

ISO21501 Determination of particle size distribution - Light scattering airborne particle counters for clean spaces

The institute of Environmental Sciences and Technology (IEST)

www.iest.org

Parenteral Drug Association

www.pda.org

European Directorate for the Quality of Medicines & Healthcare

www.edqm.eu

Electronic Industries Alliance (EIA)

www.iea.org

Global Semiconductor Alliance

www.gsaglobal.org

International Society of Automation (ISA)

www.isa.org

Korea Semiconductor Industry Association (KSIA)

www.ksia.or.kr

Taiwan Semiconductor Industry Association (TSIA)

www.tsia.org.tw

Semiconductor Industry Association (SIA)

www.semichips.org

Semiconductor Equipment Association of Japan (SEAJ)

www.seaj.or.jp/english/

MET ONE Facility Monitoring Systems

Windows-based SCADA (Supervisory Control and Data Acquisition) software based on the use of a real-time database

Completely customizable user interface (map of your facility, area or tool)

Monitor 1 to hundreds of locations simultaneously

Completely 21 CFR Part 11 compliance (secure data management)

Integrated secure audit trail

Single user or client-server system

Advanced alarming (acknowledgment), reporting, data display (value tables, trend charts)

Batch-driven data capture, display and reporting

Industry standard communications protocols (analog, digital, serial, modbus RTU/TCP, OPC)

Met One Facility Monitoring Systems - LITE

Configure a compliant monitoring system in minutes utilizing an easy-to-use wizard.

Monitors up to 20 locations on a single screen

Provide secure operations using Windows user names and passwords

Includes system validation documents

Reporting and data export

Supports alarm panels

Supports digital IO and analog environmental sensors (RH/Temp, Delta P)

Met One Data Management Software

Compatible with all MET ONE air particle counters

Enables capture of enhanced features beyond just particle counts (flow, calibration dates, location, batch IDs etc.)

Compatible with most OPC clients

Enable secure data integration to your ERP, BMS, LIMS or other enterprise network solution